Course syllabus for Microsystems technology

Preferably you should have a B.Sc. or equivalent in electrical engineering, engineering physics or mechanical engineering. The examinator of the course can make exceptions in special cases.

To give the participants general knowledge and deeper understanding of
modern silicon based microsensors, microactuators and microsystems.

• explain when and why modern silicon based microsystems are useful Examined: written exam
• describe the basic principles of silicon based microfabrication Examined: written exam
• draw simple mask layouts and design process plans for the fabrication (in clean-room) of microstructures and conclude what the resulting structures should look like Examined: written exam
• describe the function of a wide range of microdevices Examined: written exam
• consider and evaluate effects of miniaturization for (transducer) device functionality Examined: written exam
• discuss microdevice design and fabrication considerations Examined: project meetings, written exam
• critically scrutinize results from electrical measurements on microstructures Examined: written exam
• present project results in a scientific way in written and oral form Examined: project report and presentation

Techniques for microsystem fabrication
Review of principles for realization of microstructures
Measurement techniques
Device examples, provided also by guest lecturers from the industry and company visit to producers of micromechanical sensors
Project work where the design, fabrication and evaluation of a micromechanical sensor is demonstrated

A lecture series is provided throughout the course.

Guest lecturers from the industry describe commercialized micromechanical sensors and give insight into how microsystems can be commercialized.

Fabrication demonstrations in our cleanroom facility, COMSOL tutorials, a characterization exercize in the measurement laboratory and visit to a local company in the field are compulsory elements.

A major part of the studies is in the form a project work concerning the conceptualization, design and (planned) fabrication of a microstructured device. A literature study and the project presentation (written and oral) are also included in the project work.

Recommendations
Introductory MEMS, Fabrication and Applications, T. M. Adams, R. A. Layton, Springer, ISBN 978-0-387-09510-3

Microsensors MEMS and Smart devices, Julien W. Gardner, Vijay K. Varadan and Osama O Awadelkarim, John Wiley & Sons, ISBN 0-471-86109-X.

Micromachined Transducers Sourcesbook, Gregory T.A. Kovacs, WCB/McGraw-Hill, ISBN 0-07-290722-3

The course consists of two parts in the form of a lecture series and a project work done by groups of up to 3 students. The final grade for each student is determined from the results of a mandatory written exam, a written report and oral presentation of the project work.
In order to pass the student must have participated in the fabrication demonstration in the cleanroom, simulation exercise with COMSOL, characterization exercise in the measuerment lab and a company visit.