SEM: LEO Ultra

The LEO Ultra 55 is a dedicated high vacuum and high resolution SEM that allows for imaging with a resolution down to 1 nm. The instrument has a field emission gun and is also equipped with an EDX (energy dispersive X-ray) detector for chemical analysis, an EBSD (electron backscattered diffraction) detector for grain orientation and texture analysis, and a STEM (scanning transmission electron microscopy) detector for thin foil analysis.

Instrument data:

• Spatial Resolution: 15 kV: 1.0 nm, 1 kV: 1.7 nm, 0.1 kV: 4.0 nm
• Operating voltage: 0.1-30 kV
• Probe current: 4 pA-10 nA
• Field emission gun (FEG)
• Equipped with:
  - Oxford Inca EDX system
  - EBSD system
  - STEM detector