SEM: FEI Quanta

The Quanta 200 ESEM FEG from FEI is a special type of high performance scanning electron microscope (SEM). It is equipped with a Schottky field emission gun (FEG) for optimal spatial resolution. The instrument can be used in high vacuum mode (HV), low-vacuum mode (LV) and the so called ESEM (Environmental SEM) mode. This makes it possible to study samples in pressures up to 20 Torr. The microscope is equipped with an Oxford Inca Energy Dispersive X-ray (EDX) system for chemical analysis. Qualitative and quantitative analysis, elemental mapping and linescans can be performed. The microscope can also be equipped with a peltier stage for studies of wet samples in-situ. There are two heating stages available for in-situ heating experiments up to 1000°C. This can be done in combination with having an external gas present in the chamber, e.g. air, for studying chemical reactions, such as oxidation, at high temperatures.

Instrument data:

• Operational vacuum modes: HV, LV and ESEM
• Spatial Resolution: 15 kV: 2.1 nm, 1 kV: 5 nm
• Operating voltage: 0.5-30 kV
• Probe current: < 100 nA
• Field emission gun
• Equipped with:
  - Oxford X-max 80 EDX
  - Peltier stage (-20°C - +100°C)
  - Heating stage (1000°C)
  - Cathodoluminescence