FIB-SEM: FEI Versa3D

The FEI Versa3D LoVac DualBeam integrates a field emission SEM with a FIB. The SEM unit is equipped with detectors for secondary and backscattered electron imaging. The ion column uses a Ga liquid ion metal source (LMIS) and a set of electrostatic lenses for bombarding the target material with a focused ion-beam for material removal or deposition. The instrument is also equipped with a Gas Injection System (GIS) for deposition of Pt and an Omniprobe for TEM thin foil extraction.

The Versa has three different vacuum modes; high vacuum, low vacuum and ESEM, to deal with different type of samples. The two latter modes facilitate imaging at pressures ranging from 0.1 to 20 torr. A wetSTEM detector makes it possible to study electron transparent wet samples. FIB imaging and milling is only permitted in the high vacuum mode, though.

Instrument data

FIB

• Ga ion source
• Operating voltage: 500 V - 30 kV
• Currents: 1.1 pA – 65 nA

SEM

• Field emission gun,
• Operating voltage: 500 V - 30 kV